Updated: Jun 24, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
A G Poleshchuk1, R K Nasyrov, J-M Asfour
1Institute of Automation and Electrometry, Russian Academy of Science, Russia.
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A new Diffractive Fizeau Null Lens (DFNL) method uses a hybrid computer-generated hologram (CGH) to accurately test steep aspheres. This novel approach eliminates wavefront distortion for improved surface testing precision.
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