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Updated: Jun 24, 2026

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Spectral and Angle-Resolved Magneto-Optical Characterization of Photonic Nanostructures
Published on: November 21, 2019
Subsurface microscopy of integrated circuits with angular spectrum and polarization control
F H Köklü1, S B Ippolito, B B Goldberg
1Department of Physics, Electrical and Computer Engineering and the Photonics Center, Boston University, 8 Saint Mary's Street, Boston, Massachusetts 02215, USA.
Optics Letters
|April 17, 2009
Abstract:
We investigate the effect of an annular pupil-plane aperture in confocal imaging while using an NA increasing lens. We show that focal spot shape is highly sensitive to both polarization and angular spectrum of the incoming light. We demonstrate a lateral spatial resolution of 145 nm (lambda(0)/9) in the direction perpendicular to the polarization direction.

