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Updated: Jun 23, 2026
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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
A lateral-field-excited LiTaO3 high-frequency bulk acoustic wave sensor
Donald F McCann1, Jason M McGann, Jesse M Parks
1Laboratory for Surface Science and Technology, University of Maine, Orono, ME, USA. donald.mccann@umit.maine.edu
Summary
Researchers explored lithium tantalate (LiTaO3) for advanced bulk acoustic wave (BAW) sensors. These new lateral field excitation (LFE) sensors offer high-frequency operation and sensitive detection of liquid properties.
Area of Science:
- Materials Science
- Sensor Technology
- Acoustic Physics
Background:
- Quartz Crystal Microbalance (QCM) is a popular bulk acoustic wave (BAW) sensor using thickness field excitation (TFE).
- Transverse Shear Mode (TSM) in QCMs can be excited by Lateral Field Excitation (LFE), exposing a bare sensing surface for direct analyte interaction.
- LFE sensors enable detection of both mechanical and electrical property changes.
Purpose of the Study:
- Investigate alternative piezoelectric materials for temperature-compensated TSMs.
- Identify orientations supporting high-frequency operation for enhanced sensitivity.
- Explore Lithium Tantalate (LiTaO3) for high-performance LFE BAW sensors.
Main Methods:
- Theoretical search for suitable piezoelectric crystal orientations.
- Experimental fabrication of prototype LFE LiTaO3 sensors.
- Performance evaluation at frequencies exceeding 1 GHz.
Main Results:
- Identified LiTaO3 as a material supporting high-frequency temperature-compensated TSMs.
- Demonstrated prototype LFE LiTaO3 sensors operating above 1 GHz.
- Achieved sensitive detection of viscosity, conductivity, and dielectric constant variations in liquids.
Conclusions:
- LiTaO3 is a promising material for developing next-generation LFE BAW sensors.
- These sensors offer significant advantages in sensitivity and operational frequency.
- The developed sensors can be utilized for real-time monitoring of diverse liquid properties.
