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Updated: Jun 23, 2026

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Thermocompression bonding of vertically aligned carbon nanotube turfs to metalized substrates
R D Johnson1, D F Bahr, C D Richards
1School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99163, USA.
Abstract:
Vertically aligned carbon nanotube turfs (VACNTs), consisting of entwined, nominally vertical carbon nanotubes, are being proposed for use as electrical and thermal contact materials. Issues in their implementation include high contact resistance, the van der Waals interactions of carbon nanotubes, and a low temperature limit during processing. One route for circumventing the 750 degrees C temperatures required for VACNT growth using chemical vapor deposition is for the VACNTs to be grown separately, and then transferred to the device. A method of mechanical transfer, using thermocompression bonding, has been developed, allowing dry mechanical transfer of the VACNTs at 150 degrees C. This method can be used for the construction of both a thermal switch or a permanent conducting channel. The conductivity of the bonded structure is shown to be independent of the imposed strain, up to strains in excess of 100%.

