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Updated: Jun 23, 2026

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
The rapid growth of vertically aligned carbon nanotubes using laser heating
J B Park1, S H Jeong, M S Jeong
1Department of Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea.
None:
Growth of densely packed vertically aligned carbon nanotubes (VA-CNTs) using laser-induced chemical vapor deposition with visible laser (lambda = 532 nm) irradiation at room temperature is reported. Using a multiple-catalyst layer (Fe/Al/Cr) on quartz as the substrate and an acetylene-hydrogen mixture as the precursor gas, VA-CNT pillars with 60 microm height and 4 microm diameter were grown at a high rate of around 1 microm s(-1) with good reproducibility. It is demonstrated that the fabrication of uniform pillar arrays of VA-CNTs can be achieved with a single irradiation for each pillar using LCVD with no annealing or preprocessing of the substrate. Here, laser fast heating is considered the primary mechanism facilitating the growth of VA-CNT pillars. Field emission characteristics of an array of VA-CNT pillars were then examined to investigate their potential application in vacuum electronic devices.

