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Updated: Jun 23, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
High-resolution, wide-field object reconstruction with synthetic aperture Fourier holographic optical microscopy
Timothy R Hillman1, Thomas Gutzler, Sergey A Alexandrov
1Optical+Biomedical Engineering Laboratory (OBEL), School of Electrical, Electronic & Computer Engineering, The University of Western Australia, Crawley, Western Australia, Australia. hillm-tr@ee.uwa.edu.au
Abstract:
We utilize synthetic-aperture Fourier holographic microscopy to resolve micrometer-scale microstructure over millimeter-scale fields of view. Multiple holograms are recorded, each registering a different, limited region of the sample object's Fourier spectrum. They are "stitched together" to generate the synthetic aperture. A low-numerical-aperture (NA) objective lens provides the wide field of view, and the additional advantages of a long working distance, no immersion fluids, and an inexpensive, simple optical system. Following the first theoretical treatment of the technique, we present images of a microchip target derived from an annular synthetic aperture (NA = 0.61) whose area is 15 times that due to a single hologram (NA = 0.13); they exhibit a corresponding qualitative improvement. We demonstrate that a high-quality reconstruction may be obtained from a limited sub-region of Fourier space, if the object's structural information is concentrated there.
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