Polarization and angular dependent transmissions on transferred nanomembrane Fano filters

We report angular and polarization dependent transmission properties of Fano resonance optical filters with transferred silicon nanomembrane on glass substrate. The transmission spectra of the filters can have either weak or strong polarization and angular dependence, depending on properties of individual Fano resonance modal dispersion. Measurement results agree very well with simulations based on a rigorous coupled-wave analysis for the transmission spectra, on planewave expansion wave-vector technique for the dispersion property analysis, and on a three-dimensional finite-difference time-domain technique for the propagating modal study. These results will provide importance guidance for the design of a new class of ultra-compact surface-normal frequency selective components with preferred polarization and angular properties. These components are highly desirable for silicon photonic integration.