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Updated: Jun 23, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Line-source based x-ray tomography
Deepak Bharkhada1, Hengyong Yu, Hong Liu
1Biomedical Imaging Division, VT-WFU School of Biomedical Engineering & Sciences, Wake Forest University, Winston-Salem, NC 27157, USA.
Abstract:
Current computed tomography (CT) scanners, including micro-CT scanners, utilize a point x-ray source. As we target higher and higher spatial resolutions, the reduced x-ray focal spot size limits the temporal and contrast resolutions achievable. To overcome this limitation, in this paper we propose to use a line-shaped x-ray source so that many more photons can be generated, given a data acquisition interval. In reference to the simultaneous algebraic reconstruction technique (SART) algorithm for image reconstruction from projection data generated by an x-ray point source, here we develop a generalized SART algorithm for image reconstruction from projection data generated by an x-ray line source. Our numerical simulation results demonstrate the feasibility of our novel line-source based x-ray CT approach and the proposed generalized SART algorithm.
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