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Related Concept Videos

Elastic Strain Energy for Shearing Stresses01:20

Elastic Strain Energy for Shearing Stresses

As discussed in previous lessons, strain energy in a material is the energy stored when it is elastically deformed, a concept crucial in materials science and mechanical engineering. This energy results from the internal work done against the cohesive forces within the material. When a material undergoes shearing stress and corresponding shearing strain, the strain energy density, which is the energy stored per unit volume, is calculated. Within the elastic limit, where the stress is...
Members Made of Elastoplastic Material01:19

Members Made of Elastoplastic Material

The behavior of elastoplastic materials under bending stresses, particularly in structural members with rectangular cross-sections, is crucial for predicting material responses and understanding failure modes. Initially, when a bending moment is applied, the stress distribution across the section follows Hooke's Law and is linear and elastic. This distribution means the stress increases from the neutral axis to the maximum at the outer fibers, up to the elastic limit.
As the bending moment...
Magnetic Damping01:17

Magnetic Damping

Eddy currents can produce significant drag on motion, called magnetic damping. For instance, when a metallic pendulum bob swings between the poles of a strong magnet, significant drag acts on the bob as it enters and leaves the field, quickly damping the motion.
If, however, the bob is a slotted metal plate, the magnet produces a much smaller effect. When a slotted metal plate enters the field, an emf is induced by the change in flux; however, it is less effective because the slots limit the...
Residual Stresses in Bending01:18

Residual Stresses in Bending

In the study of elastoplastic members subjected to bending moments, understanding the loading and unloading phases is crucial for assessing material behavior and structural integrity. During the loading phase, as the bending moment increases, the material initially responds elastically, adhering to Hooke's Law, where stress is directly proportional to strain. When the load exceeds the yield strength, plastic deformation occurs, resulting in permanent strain and deformation that remains even...
Relation between Poisson's ratio, Modulus of Elasticity and Modulus of Rigidity01:15

Relation between Poisson's ratio, Modulus of Elasticity and Modulus of Rigidity

Deformation occurs in axial and transverse directions when an axial load is applied to a slender bar. This deformation impacts the cubic element within the bar, transforming it into either a rectangular parallelepiped or a rhombus, contingent on its orientation. This transformation process induces shearing strain. Axial loading elicits both shearing and normal strains. Applying an axial load instigates equal normal and shearing stresses on elements oriented at a 45° angle to the load axis.
Flexural Stress01:16

Flexural Stress

When analyzing bending in symmetric members, it's crucial to understand how stresses distribute when subjected to bending moments. This stress distribution is effectively described by applying fundamental mechanics and material science principles, particularly Hooke's Law for elastic materials.
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Related Experiment Video

Updated: Jun 23, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
09:46

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

Thermoelastic dissipation in MEMS/NEMS flexural mode resonators.

Jize Yan1, Ashwin A Seshia

  • 1Department of Engineering and Nanoscience Centre, University of Cambridge, CB2 1PZ, UK.

Journal of Nanoscience and Nanotechnology
|May 16, 2009
PubMed
Summary

This study identifies thermoelastic dissipation (TED) as the main energy loss in silicon micro/nano-electromechanical systems (MEMS/NEMS) resonators. It provides design guidelines to minimize TED and enhance resonator quality factor (Q).

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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Last Updated: Jun 23, 2026

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15:25

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

Area of Science:

  • Solid State Physics
  • Materials Science
  • Nanotechnology

Background:

  • Micro/nano-electromechanical systems (MEMS/NEMS) resonators are crucial for sensors and signal processing.
  • The Quality factor (Q) is a key performance metric, directly impacted by energy dissipation.
  • Understanding internal friction mechanisms is vital for optimizing MEMS/NEMS device performance.

Purpose of the Study:

  • To investigate energy dissipation mechanisms in single-crystal silicon MEMS/NEMS resonators.
  • To identify thermoelastic dissipation (TED) as the dominant loss mechanism in flexural modes.
  • To establish theoretical criteria for minimizing TED through geometrical design optimization.

Main Methods:

  • Theoretical analysis of energy dissipation in flexural mode resonators.
  • Focus on thermoelastic dissipation (TED) as the primary internal friction mechanism.
  • Derivation of design guidelines for single-crystal silicon resonators.

Main Results:

  • Thermoelastic dissipation (TED) is confirmed as the dominant energy loss in silicon MEMS/NEMS flexural resonators.
  • Theoretical criteria for geometrical design optimization are established.
  • Guidelines are presented to minimize TED and maximize the Quality factor (Q).

Conclusions:

  • Minimizing thermoelastic dissipation (TED) is essential for enhancing the Quality factor (Q) of silicon MEMS/NEMS resonators.
  • Geometrical design plays a critical role in controlling TED.
  • The findings provide a theoretical basis for designing high-performance MEMS/NEMS devices.