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Related Experiment Video

Updated: Jun 23, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments
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Published on: February 27, 2013

Novel laser datum system for nanometric profilometry for large optical surfaces.

Ho-Soon Yang, Sug-Whan Kim, David Walker

    Optics Express
    |May 23, 2009
    PubMed
    Summary

    A new laser datum system precisely measures large curved optical surfaces. This system achieves high accuracy, with repeatability within +/- 4 nm rms for advanced optical metrology.

    Area of Science:

    • Optical engineering
    • Metrology
    • Precision measurement systems

    Background:

    • Accurate measurement of large, curved optical surfaces is critical for advanced optical systems.
    • Existing profilometry techniques may face limitations in precision and scalability for large optics.

    Purpose of the Study:

    • To introduce and validate a novel laser datum system for high-precision point-by-point profilometry.
    • To assess the performance and accuracy of the developed system for large curved optical surfaces.

    Main Methods:

    • Development of a laser datum system utilizing a nulling quadrant photodiode and a flexural system with hybrid actuators.
    • Integration of interferometer reference optics for precise vertical and horizontal displacement measurements.
    • Investigation of flexure characteristics (cross-talk, hysteresis) and optimization of environmental conditions for active position control.

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    Last Updated: Jun 23, 2026

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  • Modeling and implementation of a closed-loop control system for enhanced accuracy.

    • Main Results:

    • The system demonstrated excellent repeatability of +/- 4 nm root mean square (rms).
    • Achieved compensation accuracy of 10 nm in the vertical channel and 20 nm in the horizontal channel.
    • Characterized flexure behavior and identified optimal environmental conditions for system stability.

    Conclusions:

    • The developed laser datum system offers a robust solution for precision profilometry of large curved optical surfaces.
    • The system's high accuracy and repeatability meet stringent requirements for advanced optical manufacturing and testing.
    • Further research can explore applications in other fields requiring high-precision surface metrology.