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Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication

Sung-Il Chang, Jun-Bo Yoon

    Optics Express
    |June 3, 2009
    PubMed
    Summary

    This study presents a novel method for creating plastic microlens arrays using UV lithography and replication. The technique allows for controllable shapes and tunable focal lengths, offering a versatile approach to microlens fabrication.

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    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Microfabrication

    Background:

    • Microlens arrays are crucial optical components in various imaging systems.
    • Existing fabrication methods can be complex and costly.
    • There is a need for simple, versatile, and cost-effective microlens fabrication techniques.

    Purpose of the Study:

    • To develop a simple and effective method for fabricating plastic microlens arrays.
    • To achieve controllable microlens shape and high fill-factor.
    • To demonstrate the tunability of focal length in the fabricated microlenses.

    Main Methods:

    • Utilized conventional lithography and plastic replication.
    • Introduced a diffuser to randomize ultraviolet (UV) light paths for 3D latent image formation in photoresist.

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  • Replicated concave microlens molds onto polydimethylsiloxane (PDMS).

    • Main Results:

    • Successfully fabricated plastic microlens arrays with controllable shapes and high fill-factor.
    • Observed tunable focal lengths ranging from 13-88 micrometers, dependent on UV exposure dose.
    • Achieved a smooth surface roughness of 2.6 nm (RMS) on the microlens mold using elevated temperature curing (85°C).

    Conclusions:

    • The proposed method offers a simple, versatile, and effective approach for plastic microlens array fabrication.
    • The technique is adaptable for various plastic materials.
    • The controllable focal length and high-quality surface finish make these microlenses suitable for diverse optical applications.