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Semiconductor hollow optical waveguides formed by omni-directional reflectors
Optics Express
|June 3, 2009
Summary
Researchers designed and fabricated a novel hollow optical waveguide using silicon-based materials and omni-directional reflectors. This polarization-independent waveguide exhibits low propagation loss, making it suitable for optical communication applications.
Area of Science:
- Photonics and Optical Engineering
- Materials Science
- Nanotechnology
Background:
- Hollow optical waveguides offer potential advantages for light propagation.
- Silicon-based photonics is a rapidly advancing field.
- Omni-directional reflectors are crucial for confining light within waveguides.
Purpose of the Study:
- To design, fabricate, and characterize a novel hollow optical waveguide.
- To achieve polarization-independent light propagation.
- To evaluate the performance of silicon-based omni-directional reflectors in a hollow waveguide structure.
Main Methods:
- Fabrication using dry etching and plasma-enhanced chemical vapor deposition (PECVD) for Si/SiO2 thin films.
- Integration of omni-directional reflectors with a silicon wafer.
- Characterization of waveguide performance for TE and TM modes across the C+L band.
Main Results:
- Successful fabrication of a hollow optical waveguide with an air core measuring 1.2µm x 1.3µm.
- Achieved a uniform propagation loss of approximately 1.7 dB/cm for both TE and TM modes.
- Demonstrated polarization-independent operation of the hollow optical waveguide.
Conclusions:
- The developed silicon-based hollow optical waveguide with omni-directional reflectors is a viable technology.
- The waveguide exhibits low propagation loss and polarization independence.
- This technology holds promise for integrated optical communication systems.

