Quantitative measurements of Kikuchi bands in diffraction patterns of backscattered electrons using an electrostatic...

Area of Science:

• Materials Science
• Solid State Physics
• Crystallography

Background:

• Electron diffraction provides high-resolution crystallographic data.
• Dynamical theory accurately models backscattered electron patterns in scanning electron microscopes (SEM).
• Quantitative comparison requires angle-resolved intensity and energy measurements, challenging for SEMs.

Purpose of the Study:

• To quantitatively measure backscattered electron diffraction patterns with high energy resolution.
• To validate dynamical theory predictions for electron diffraction.
• To investigate the influence of electron energy loss on diffraction patterns.

Main Methods:

• Utilized an electrostatic analyzer for angle-resolved measurements of backscattered electrons.
• Operated at electron energies up to 40 keV with sub-eV energy resolution.
• Performed measurements across various geometries and incident energies.

Main Results:

• Achieved good agreement between experimental diffraction patterns and dynamical theory predictions.
• Demonstrated the capability of the electrostatic analyzer for precise measurements.
• Found that intensity variations in diffraction patterns decrease slowly with energy loss up to 60 eV.

Conclusions:

• The electrostatic analyzer enables accurate, quantitative analysis of backscattered electron diffraction.
• Experimental validation of dynamical electron diffraction theory is enhanced by high-resolution energy measurements.
• Electron energy loss has a limited effect on the observed diffraction pattern characteristics.