Related Experiment Video
Updated: Jun 22, 2026

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Quantitative measurements of Kikuchi bands in diffraction patterns of backscattered electrons using an electrostatic
M R Went1, A Winkelmann, M Vos
1Atomic and Molecular Physics Laboratories, Research School of Physics and Engineering, Australian National University, Canberra ACT, Australia.
Abstract:
Diffraction patterns of backscattered electrons can provide important crystallographic information with high spatial resolution. Recently, the dynamical theory of electron diffraction was applied to reproduce in great detail backscattering patterns observed in the scanning electron microscope (SEM). However, a fully quantitative comparison of theory and experiment requires angle-resolved measurements of the intensity and the energy of the backscattered electrons, which is difficult to realize in an SEM. This paper determines diffraction patterns of backscattered electrons using an electrostatic analyzer, operating at energies up to 40 keV with sub-eV energy resolution. Measurements are done for different measurement geometries and incoming energies. Generally a good agreement is found between theory and experiment. This spectrometer also allows us to test the influence of the energy loss of the detected electron on the backscattered electron diffraction pattern. It is found that the amplitude of the intensity variation decreases only slowly with increasing energy loss from 0 to 60 eV.
More Related Videos
09:13Characterization of Ultra-fine Grained and Nanocrystalline Materials Using Transmission Kikuchi Diffraction
Published on: April 1, 2017
07:24Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Related Concept Videos
Atomic Emission Spectroscopy: Lab
Inductively Coupled Plasma Atomic Emission Spectroscopy: Instrumentation
There are three main types of inductively coupled plasma atomic emission spectroscopy (ICP-AES) instruments: sequential, simultaneous multichannel, and Fourier transform instruments, with the latter being less commonly used.
X-ray Crystallography
Diffraction
Diffraction is the change in the direction of travel experienced by an electromagnetic wave when it encounters a physical barrier whose dimensions are comparable to those of the wavelength of the light. X-rays are electromagnetic radiation with wavelengths about as long as the distance between neighboring...
Atomic Emission Spectroscopy: Overview
Atomic Emission Spectroscopy: Instrumentation
X-ray Diffraction of Biological Samples
According to Bragg's law, when X-rays strike the sample positioned on a stage, the rays are scattered by the electron clouds around the sample atoms. The X-ray diffraction or scattering is caused by constructive interference of the X-ray waves that reflect off the internal crystal...