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Updated: Jun 22, 2026

Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon
Published on: July 17, 2020
Atomic scale structure of (001) hydrogen-induced platelets in germanium
Marie-Laure David1, Laurent Pizzagalli, Fréderic Pailloux
1Laboratoire PHYMAT, Université de Poitiers/CNRS UMR 6630, 86962 Futuroscope-Chasseneuil cedex, France.
Abstract:
An accurate characterization of the structure of hydrogen-induced platelets is a prerequisite for investigating both hydrogen aggregation and formation of larger defects. On the basis of quantitative high resolution transmission electron microscopy experiments combined with extensive first principles calculations, we present a model for the atomic structure of (001) hydrogen-induced platelets in germanium. It involves broken Ge-Ge bonds in the [001] direction that are dihydride passivated, vacancies, and trapped H(2) molecules, showing that the species involved in platelet formation depend on the habit plane. This model explains all previous experimental observations.
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