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Micro actuated grating for multi-beam optical pickups.

Chi-Hung Lee, Yi Chiu, Han-Ping D Shieh

    Optics Express
    |June 18, 2009
    PubMed
    Summary
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    A novel curved polysilicon actuator with a grating enables optical data storage on a single silicon chip. This device switches between single and multiple beams for efficient data writing and reading on discs.

    Area of Science:

    • Micro-electro-mechanical systems (MEMS)
    • Optoelectronics
    • Materials Science

    Background:

    • Optical data storage, particularly recordable optical pickups, requires precise beam manipulation.
    • Existing technologies often involve complex and bulky components, limiting miniaturization.
    • Integration of optical functions onto a single silicon chip is a key goal for next-generation data storage.

    Purpose of the Study:

    • To develop a stress-induced curved polysilicon actuator with an integrated grating for optical pickup applications.
    • To demonstrate the feasibility of realizing recordable optical pickups on a single silicon chip.
    • To enable efficient data writing and reading functionalities through beam switching.

    Main Methods:

    • Utilized a micro-machining process involving two layers of polysilicon and one layer of silicon nitride.

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    Fabrication of a Low-Cost, Fiber-Coupled, and Air-Spaced Fabry-P&#233;rot Etalon
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  • Fabricated a stress-induced curved polysilicon actuator integrated with a diffraction grating.
  • Applied voltage to the actuator to induce stress and control beam diffraction.

    • Main Results:

    • Successfully generated three diffracted beams of equal intensity in each order from the grating upon voltage application.
    • Demonstrated the actuator's ability to switch between single-beam and multiple-beam diffraction modes.
    • Achieved the integration of the actuator and grating on a single silicon chip.

    Conclusions:

    • The developed stress-induced curved polysilicon actuator is suitable for recordable optical pickup applications.
    • The single-chip integration offers a pathway towards miniaturized and efficient optical data storage solutions.
    • The beam switching capability is directly applicable to distinct data writing and reading processes in optical discs.