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Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
Published on: February 12, 2017
Rafal Klajn1, Paul J Wesson, Kyle J M Bishop
1Department of Chemical and Biological Engineering, Department of Chemistry, Northwestern University, 2145 Sheridan Rd., Evanston, IL 60208, USA.
No abstract available in PubMed .