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Updated: Jun 22, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Non-turning-point monitoring improves narrow bandpass filters
1Willey Optical Consultants, 13039 Cedar Street, Charlevoix, Michigan 49720, USA. ron@willeyoptical.com
Abstract:
Historic practice has been to optically monitor narrow bandpass filters by the termination of each layer at a turning point. The problem is that turning points are the least sensitive points to the change of the optical signal with thickness and, thereby, those points are most prone to errors. It is shown that better performance in the production results can be achieved by designing and monitoring in order to terminate layers at non-turning points. A further advantage has been discovered wherein nonoptical monitoring of some layers is used to achieve even better stability in the production result. Simulation programs have been applied to such designs and demonstrate the advantages as compared to the historical approach.
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