Widely tunable guided-mode resonance nanoelectromechanical RGB pixels

Widely tunable display pixels are reported. The pixel consists of a subwavelength silicon-nitride/air membrane containing complementary fixed and mobile gratings. By altering the device refractive index profile and symmetry, using MEMS actuation methods, wavelength tuning across ~100 nm per pixel in the visible spectral region is shown to be possible. Initial results illustrating the influence of structural symmetry, pixel thickness, and polarization on the spectral response are provided. These pixels exhibit ~+/-4 degrees angular acceptance aperture. Applications in compact display systems are envisioned.