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Evanescent Field Based Photoacoustics: Optical Property Evaluation at Surfaces

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Angle-resolved annular data acquisition method for microellipsometry.

Sang-Heon Ye¹, Soo Hyun Kim, Yoon Keun Kwak

¹1Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, 373-1 Guseong-dong, Yuseong-gu, Daejeon 305-701, Republic of Korea.

|June 25, 2009

Summary

A new microellipsometer method measures optical properties using a high numerical aperture lens for sub-micrometer, real-time data acquisition without moving parts. This technique successfully analyzed silicon dioxide thin films.

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Area of Science:

Optical Physics
Materials Science
Nanotechnology

Background:

Ellipsometry is a powerful technique for characterizing thin films.
Traditional methods can be limited by probe size and measurement speed.

Purpose of the Study:

To introduce a novel ellipsometric data acquisition method.
To enable high-resolution, real-time optical property measurements.

Main Methods:

Utilized a microellipsometer with a high numerical aperture objective lens.
Achieved multi-angle incident ellipsometry with a sub-micrometer probe beam.
Implemented a design with no moving parts for real-time measurements.

Main Results:

Demonstrated successful measurement of optical properties for various silicon dioxide (SiO2) thin films.
Obtained ellipsometric data at multiple incident angles with sub-micrometer spatial resolution.
Validated the feasibility of real-time optical characterization.

Conclusions:

The developed microellipsometer technique offers a significant advancement for thin film analysis.
The method provides high spatial resolution and real-time capabilities.
Calibration techniques were described and demonstrated.