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Updated: Jun 22, 2026

Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing

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Self-supported three-dimensional nanoelectrodes for microbattery applications.

Seng Kian Cheah¹, Emilie Perre, Mårten Rooth

¹Department of Materials Chemistry, The Angström Laboratory, Uppsala University, SE-751 21 Uppsala, Sweden.

|July 4, 2009

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A novel 3D nanostructured microbattery using titanium dioxide (TiO2) demonstrates a tenfold capacity increase over 2D systems. This advancement in lithium-ion battery technology offers significantly improved energy storage for microdevices.

Area of Science:

Materials Science
Electrochemistry
Nanotechnology

Background:

Traditional 2D microbatteries face limitations in energy density and capacity.
Advancements in nanostructuring offer potential for enhanced electrochemical performance.

Purpose of the Study:

To develop and evaluate a nanostructured three-dimensional (3D) microbattery for lithium-ion applications.
To compare the performance of the 3D microbattery architecture against conventional 2D systems.

Main Methods:

Fabrication of a 3D microbattery using aluminum nanorod current collectors coated with 17 nm titanium dioxide (TiO2) via atomic layer deposition (ALD).
Assembly with an electrolyte and a metallic lithium counter electrode.
Electrochemical cycling for over 50 cycles.

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Main Results:

The 3D nanostructured microbattery achieved a 10-fold increase in total capacity compared to a 2D system with the same footprint.
Stable electrochemical cycling was demonstrated for more than 50 cycles.

Conclusions:

The 3D architecture significantly enhances the energy storage capacity of microbatteries.
Nanostructured TiO2 on aluminum nanorods is a promising approach for high-performance microbattery development.