Suppressing phase errors from vibration in phase-shifting interferometry

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Updated: Jun 21, 2026

Shaping the Amplitude and Phase of Laser Beams by Using a Phase-only Spatial Light Modulator
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Shaping the Amplitude and Phase of Laser Beams by Using a Phase-only Spatial Light Modulator

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Leslie L Deck1

  • 1Zygo Corporation, Middlefield, Connecticut 06455, USA. LDeck@zygo.com

Applied Optics
|July 14, 2009
PubMed

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