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Algorithm for ion beam figuring of low-gradient mirrors.

Changjun Jiao1, Shengyi Li, Xuhui Xie

  • 1National University of Defense Technology, DeYa, Changsha, Hunan Province, 410073 China. kdjcj@vip.sina.com

Applied Optics
|July 23, 2009
PubMed
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Ion beam figuring offers precise, noncontact mirror surface correction. This advanced technique avoids tool wear and edge effects, achieving sub-1/100 lambda accuracy for complex mirror shapes.

Area of Science:

  • Optics and Materials Science
  • Precision Engineering
  • Surface Metrology

Background:

  • Conventional polishing methods for optical surfaces face limitations like tool wear and edge effects.
  • Low-gradient mirrors require advanced figuring techniques to achieve high precision.
  • Ion beam figuring (IBF) presents a noncontact alternative for precise material removal.

Purpose of the Study:

  • To develop and validate an ion beam figuring methodology for low-gradient mirrors.
  • To establish an iterative dwell time algorithm based on Bayesian principles and computer-controlled optical surfacing (CCOS).
  • To enable the precise shaping of mirrors with non-axis-symmetrical errors.

Main Methods:

  • Deduction of an iterative dwell time algorithm from CCOS principles using Bayesian inference.

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  • Approximation of mirror shaping using a linear model for planar mirrors and error surface figuring.
  • Application of IBF with linear and spiral scan paths, utilizing the near-Gaussian removal function property.
  • Development of a criterion for selecting spiral parameters for optimal figuring.

    • Main Results:

    • Successful implementation of error surface figuring technology for low-gradient mirrors with linear paths.
    • Demonstration of IBF with spiral scan paths for non-axis-symmetrical errors.
    • Experimental validation on SiC and Zerodur samples, achieving final surface errors below 1/100 lambda.

    Conclusions:

    • Ion beam figuring is a highly effective noncontact technique for precise mirror surface correction.
    • The developed Bayesian-based iterative algorithm accurately deconvolutes dwell times for complex figuring paths.
    • IBF technology is capable of achieving extremely high precision for challenging optical components.