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Published on: November 30, 2012
New wide strip and grating loaded quasi-single-mode waveguide on SOI
1Institute of Semiconductor Physics, Siberian Branch Russian Academy of Sciences Prospect Lavrenteva, 13, Novosibirsk, 630090, Russia. tsarev@.isp.nsc.ru
Optics Express
|August 6, 2009
Summary
A novel silicon nitride waveguide with side gratings offers quasi-single-mode operation. This design suppresses higher-order modes, achieving a mode size of 10 micrometers with low propagation loss.
Area of Science:
- Photonics and Optical Engineering
- Materials Science
- Nanotechnology
Background:
- Conventional strip-loaded waveguides face challenges in higher-order mode suppression.
- Silicon-on-insulator (SOI) platforms are crucial for CMOS-compatible photonic integrated circuits.
Purpose of the Study:
- To propose and analyze a new wide single-mode strip and grating loaded waveguide.
- To enhance higher-order mode suppression in silicon nitride waveguides on SOI.
- To achieve quasi-single-mode operation with a large mode size and low propagation loss.
Main Methods:
- Numerical 3D simulations using the Finite-Difference Time-Domain (FDTD) method.
- Beam Propagation Method (BPM) simulations for waveguide analysis.
- Design and optimization of silicon nitride strip and silica cover with side gratings.
Main Results:
- The proposed waveguide structure utilizes silicon nitride strips and gratings on a silica cover over a silicon slab.
- Side gratings with a period of 0.6 micrometers and depth of 0.16 micrometers were found to be optimal.
- Achieved a high Figure of Merit for higher-order mode suppression.
- Demonstrated quasi-single-mode operation with a mode size of approximately 10 micrometers.
- Obtained a low propagation loss of approximately 0.3 dB/cm.
Conclusions:
- The novel grating-loaded waveguide design effectively suppresses higher-order modes.
- The proposed structure is CMOS-compatible and suitable for photonic integrated circuits.
- This waveguide offers a promising solution for achieving high-performance single-mode operation in silicon nitride photonics.

