Combining imaging ellipsometry and grazing incidence small angle X-ray scattering for in situ characterization of...

A combination of microbeam grazing incidence small angle X-ray scattering (muGISAXS) and imaging ellipsometry is introduced as a new versatile tool for the characterization of nanostructures. muGISAXS provides a local lateral and depth-sensitive structural characterization, and imaging ellipsometry adds the position-sensitive determination of the three-dimensional morphology in terms of thickness, roughness, refractive index, and extinction coefficient. Together muGISAXS and imaging ellipsometry enable a complete characterization of structure and morphology. On the basis of an example of buildup of nanostructures from monodisperse colloidal polystyrene nanospheres on a rough solid support, the scope of this new combination is demonstrated. Roughness is introduced by a dewetting structure of a diblock copolymer film with one block being compatible with the colloidal nanoparticles and one block being incompatible. To demonstrate the potential for kinetic investigations, muGISAXS and imaging ellipsometry are applied to probe the drying process of an aqueous dispersion of nanospheres on such a type of rough substrate.