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Error-reduced channeled spectroscopic ellipsometer with palm-size sensing head.

Hiroshi Okabe1, Masayuki Hayakawa, Junichi Matoba

  • 1Core Technology Center, Omron Corporation, Kyoto 619-0283, Japan. hiroshi_okabe@omron.co.jp

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Summary

A new compact channeled spectroscopic ellipsometer (CSE) prototype significantly reduces errors and maintains fast, 20 ms acquisition times. This advanced system accurately measures film thicknesses, enabling new applications requiring portability and speed.

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Area of Science:

  • Materials Science
  • Optical Engineering
  • Metrology

Background:

  • Spectroscopic ellipsometry is a powerful technique for thin film characterization.
  • Previous channeled spectroscopic ellipsometer (CSE) systems faced limitations with systematic and random errors.
  • Compactness and rapid measurement are crucial for emerging applications.

Purpose of the Study:

  • To develop and evaluate a novel prototype of a channeled spectroscopic ellipsometer (CSE).
  • To address and mitigate major error sources present in prior CSE systems.
  • To retain the advantageous features of CSE, such as a small sensing head and rapid data acquisition.

Main Methods:

  • Development of a new prototype channeled spectroscopic ellipsometer (CSE).
  • Experimental validation using 12 thin films with thicknesses ranging from approximately 3 to 4000 nm.
  • Comparison of measurements with a rotating-compensator spectroscopic ellipsometer.

Main Results:

  • The new CSE prototype effectively reduces or compensates for major systematic and random error sources.
  • Measured film thicknesses show excellent agreement with a rotating-compensator spectroscopic ellipsometer.
  • The system demonstrates high stability, with film thickness measurement variations below 0.11 nm across a temperature range of 5 to 45°C.

Conclusions:

  • The developed CSE prototype offers improved accuracy and reliability.
  • Its compact size, simplicity, and rapid response (20 ms acquisition) make it suitable for new applications.
  • This advancement broadens the applicability of spectroscopic ellipsometry in fields demanding portable and fast measurement solutions.