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Parametric nanomechanical amplification at very high frequency.

R B Karabalin¹, X L Feng, M L Roukes

¹Kavli Nanoscience Institute, California Institute of Technology, Pasadena, California 91125, USA.

|September 10, 2009

Summary

We developed novel nanoelectromechanical systems (NEMS) for very high frequency (VHF) parametric resonance and amplification. These NEMS devices enhance signal amplitude and quality factor, with performance limited by thermal effects.

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Area of Science:

Physics
Nanotechnology
Mechanical Engineering

Background:

Parametric resonance and amplification are crucial in physics and technology.
Nanoelectromechanical systems (NEMS) offer potential for high-frequency applications.

Purpose of the Study:

To report very high frequency (VHF) parametric resonators and amplifiers using NEMS.
To investigate the performance limits imposed by thermal effects in these devices.

Main Methods:

Utilizing compound mechanical nanostructures fabricated via multilayer, top-down nanofabrication.
Employing a novel readout scheme that parametrically modulates longitudinal stress in NEMS resonators.
Demonstrating parametric pumping and signal amplification up to approximately 130 MHz.

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Main Results:

Achieved useful enhancement of resonance signal amplitude and quality factor in VHF NEMS resonators.
Identified Joule heating and reduced thermal conductance as ultimate performance limitations.
Developed a theoretical model for parametric response and nonequilibrium thermal transport.

Conclusions:

The developed NEMS devices demonstrate effective VHF parametric amplification.
Thermal transport significantly influences device performance, establishing ultimate sensitivity limits.
The study elucidates scaling laws for parametric VHF NEMS resonators and sensors.