Optical real-time defect-enhancement diagnostic system

We have demonstrated an all-optical diagnostic system that enhances the observation of defects in periodic structures. This real-time technique employs a spatial light modulator as a smart-pixel array for information processing in the Fourier transform plane of a lens. The system also includes a phase-conjugate mirror for autoalignment and for correction of optical wave-front aberrations that are imparted on the object light by the smart-pixel processor and its associated optical train.