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Updated: Jun 19, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

[A micro-silicon multi-slit spectrophotometer based on MEMS technology].

Peng Hao¹, Yi-Hui Wu, Ping Zhang

¹National Key Lab of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China. hp312@126.com

Guang Pu Xue Yu Guang Pu Fen Xi = Guang Pu

|October 9, 2009

Summary

This summary is machine-generated.

A novel mini-spectrophotometer utilizing micro-silicon slit and pixel segmentation technology was developed. This compact device demonstrates excellent linear correlation for absorbance measurements, exceeding 0.999 correlation coefficients.

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Area of Science:

Optical instrumentation
Microelectromechanical systems (MEMS)

Context:

Traditional spectrophotometers can be bulky and expensive.
Advancements in microfabrication enable miniaturization of optical components.

Purpose:

To develop a compact, high-precision mini-spectrophotometer.
To investigate the impact of spectral bandwidth on absorbance linearity.
To design and fabricate an integrated micro-silicon slit.

Summary:

A mini-spectrophotometer was engineered using micro-silicon slit and pixel segmentation with a photodiode array detector.
The design theory for the spectrophotometer's slit was established, considering spectral bandwidth and slit width relationships.
A micro-silicon slit was fabricated using MEMS technology, offering small size, high precision, and thinness.

Impact:

The developed mini-spectrophotometer exhibits strong linear correlation (R² > 0.999) for absorbance measurements.
This miniaturized spectrophotometer offers potential for portable and cost-effective analytical applications.
The micro-silicon slit technology advances the field of compact optical sensing devices.