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Updated: Jun 19, 2026

Picometer-Precision Atomic Position Tracking through Electron Microscopy
Published on: July 3, 2021
Precise displacement measurement for a local surface
Sheng Lih Yeh1, Shyh Tsong Lin, Yu Hsin Chang
1Department of Mechanical Engineering, Lunghwa University of Science and Technology, 300, Section 1, Wanshou Road, Kueishan, Taoyuan County 33306, Taiwan. slyeh@mail.lhu.edu.tw
Abstract:
An optical measurement method to get the in-plane and out-of-plane displacements of a local surface using a laser is proposed. The proposed method simultaneously derives the in-plane and out-of-plane displacements by measuring the shift of interference fringes formed by scattered beams. The average errors of the in-plane and out-of-plane displacement measurements are significantly smaller than 10 nm. Moreover, the proposed method uses only low-cost optical elements.
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