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Updated: Jun 18, 2026

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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Pinpi'n and pinpii'n multilayer devices with voltage controlled optical readout
M Vieira1, A Fantoni, M Fernandes
1Electronics Telecommunication and Computer Department ISEL, R. Conselheiro Emídio Navarro, 1949-014 Lisboa, Portugal.
Journal of Nanoscience and Nanotechnology
|November 18, 2009
Summary
This study optimizes a hydrogenated amorphous silicon (a-Si:H) detector for voltage-controlled spectral sensitivity. The device can resolve red, blue, and green colors using a single sensor by adjusting electrical bias.
Area of Science:
- Materials Science
- Optoelectronics
- Semiconductor Physics
Background:
- Hydrogenated amorphous silicon (a-Si:H) is a key material in thin-film electronics.
- Multispectral photodetection requires sophisticated sensor design for color resolution.
- Voltage-controlled spectral sensitivity offers a pathway to simplified multispectral sensors.
Purpose of the Study:
- To optimize a pinpii'n type a-Si:H based detector for voltage-controlled spectral sensitivity.
- To demonstrate multispectral photodetection capabilities (red, blue, green) in a single device.
- To investigate the influence of layer thickness on spectral response and threshold voltage.
Main Methods:
- Fabrication of a glass/ITO/p-i-n a-SiC:H / a-SiC:H(-p)/a-SiC:H(-i)/Si:H(-i')/SiC:H(-n)/ITO heterostructure.
- Operation in a polychromatic mode with varying electrical bias (positive and reverse).
- Numerical simulation to analyze design parameters and photon absorption.
Main Results:
- The detector achieves regionally different collection parameters, enabling multispectral photodiodes.
- Different spectral sensitivity ranges (blue, green, red) are selected by switching electrical bias.
- Threshold voltage for green/red sensitivity is dependent on the a-SiC:H (-i) layer thickness, controlling green photon confinement.
Conclusions:
- The optimized a-Si:H detector effectively resolves multiple colors (R, G, B) with a single device through voltage control.
- Layer thickness optimization, particularly of the a-Si:H i'-layer, is crucial for tuning spectral sensitivity and threshold voltages.
- This approach provides a viable method for creating simplified multispectral photodetectors.
