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Updated: Jun 18, 2026

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Solvothermal Synthesis of MIL-96 and UiO-66-NH2 on Atomic Layer Deposited Metal Oxide Coatings on Fiber Mats
Published on: June 13, 2018
Ultra-thin microporous-mesoporous metal oxide films prepared by molecular layer deposition (MLD)
Xinhua Liang1, Miao Yu, Jianhua Li
1Department of Chemical and Biological Engineering, University of Colorado, Boulder, CO 80309, USA.
Abstract:
Porous aluminium oxide films with precisely controlled thickness down to several angstroms are deposited on particle surfaces from dense aluminium alkoxide hybrid polymer films by molecular layer deposition. Porous structures are obtained by either mild water etching at room temperature or calcination in air at elevated temperatures.

