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Template-assisted three-dimensional nanolithography via geometrically irreversible processing.

Xindi Yu¹, Huigang Zhang, John K Oliverio

¹Department of Materials Science and Engineering, Frederick Seitz Materials Research Laboratory and Beckman Institute, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA.

|November 20, 2009

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A novel nanofabrication method uses 3D templates for precise nanostructure creation. This technique efficiently produces nanoring particles and metallodielectric photonic crystals with unique optical properties.

Area of Science:

Materials Science
Nanotechnology
Optics

Background:

Template-assisted nanolithography is crucial for creating nanoscale structures.
Controlling growth and etching at specific surface curvatures presents fabrication challenges.

Purpose of the Study:

To present an innovative nanofabrication technique using template-assisted 3D nanolithography.
To demonstrate the generation of nanoring particles and metallodielectric photonic crystals.

Main Methods:

Utilizing the irreversibility of conformal growth and etching on 3D templates with negative surface curvatures.
Employing colloidal crystals as templates for nanostructure fabrication.

Main Results:

Achieved high-quantity generation of nanoring particles, surpassing conventional methods.

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Fabricated metallodielectric photonic crystals with discrete metal elements.

Observed strong near-infrared absorption and longer wavelength transmission in fabricated photonic crystals.

Conclusions:

The presented technique offers a versatile and efficient approach to 3D nanolithography.
The method enables the creation of advanced nanostructures with tunable optical properties.