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Updated: Jun 18, 2026

Simultaneous Multi-surface Anodizations and Stair-like Reverse Biases Detachment of Anodic Aluminum Oxides in Sulfuric and Oxalic Acid Electrolyte
Published on: October 5, 2017
Local anodic oxidation patterning of Au deposited Si surfaces
1Chemistry and Physics of Materials Unit and DST Unit on Nanoscience, Jawaharlal Nehru Centre for Advanced Scientific Research, Jakkur P.O., Bangalore 560064, India.
Abstract:
Nanopatterning of Si(100) surfaces deposited with Au films from physical and chemical methods, has been carried out using a AFM set up mounted with a conducting tip. At a tip bias of -12 V, the LAO patterns drawn on various Au/SiOx surfaces have been compared with those on bare Si. The height of the oxide patterns is several times higher in the case of Au covered Si surfaces compared to patterns on bare Si surface. The enhancement in LAO is related to the catalytic activity of Au nanoparticulates at SiOx interface.

