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Updated: Jun 18, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Multiwavelength digital holography with autocalibration of phase shifts and artificial wavelengths
Daniel Carl1, Markus Fratz, Marcel Pfeifer
1Fraunhofer Institute for Physical Measurement Techniques, Heidenhofstrasse 8, D-79110 Freiburg, Germany. daniel.carl@ipm.fraunhofer.de
Abstract:
A novel implementation of lensless multiwavelength digital holography with autocalibration of temporal phase shifts and artificial wavelength is presented. The algorithm we used to calculate the phase shifts was previously proposed [Opt. Lett.29 183 (2004)] and, to our knowledge, is now used for the first time in lensless holography. Because precise knowledge of the generated artificial wavelength is crucial for absolute measurement accuracy, a simple and efficient method to determine the artificial wavelength directly is presented. The calibration method is based on a simple modification of the experimental setup and needs just one additional image acquisition per wavelength. The results of shape measurement of a metallic test object with a rough surface and steep edges are shown and the measurement accuracy is discussed.

