Sample cooling or rotation improves C60 organic depth profiles of multilayered reference samples: results from a

P Sjövall1, D Rading, S Ray

  • 1Chemistry and Materials Technology, SP Technical Research Institute of Sweden, PO Box 857, SE-50115 Borås, Sweden.

Summary

Two methods, sample cooling and rotation, enhance organic depth profiling using C(60) sputtering. These techniques improve useful depth and maintain resolution by controlling sputtering yield for better quantification.