Fast diffraction computation schema for multilayer crossed gratings containing layers with 1D periodicity

Joerg Bischoff1

  • 1OSIRES Optical Engineering, Schillerstrasse 19, D-98693 Ilmenau, Germany. jb@osires.biz

Summary

This study presents a new computational method to speed up the analysis of 2D multilayer gratings. By leveraging 1D periodicity within layers, it significantly reduces computation time for rigorous coupled wave analysis (RCWA).