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Current integration force and displacement self-sensing method for cantilevered piezoelectric actuators
Ioan Alexandru Ivan1, Micky Rakotondrabe, Philippe Lutz
1Department of Automatic Control and Micro-Mechatronic Systems, FEMTO-ST Institute, UMR CNRS 6174-UFC/ENSMM/UTBM, 24 rue Alain Savary, 25000 Besançon, France.
The Review of Scientific Instruments
|January 12, 2010
Summary
This study introduces a novel self-sensing method for piezoelectric cantilevers, accurately measuring displacement and force by compensating for material nonlinearities like creep and hysteresis.
Area of Science:
- Materials Science and Engineering
- Mechanical Engineering
- Electrical Engineering
Background:
- Piezoelectric cantilevers are widely used in sensors and actuators.
- Material nonlinearities such as creep and hysteresis in piezoelectric materials hinder accurate sensing.
- Existing methods often struggle to provide reliable real-time measurements of both displacement and applied force.
Purpose of the Study:
- To develop and validate a novel self-sensing method for piezoelectric cantilevers.
- To accurately measure both displacement and external applied force at the cantilever tip.
- To compensate for material nonlinearities (creep and hysteresis) in integrated electric current measurements.
Main Methods:
- Integrated electric current compensation using the Prandtl-Ishlinskii model for hysteresis.
- Auto-regressive and moving average exogenous (ARMAX) model to minimize creep influence.
- Quasistatic estimation, electronic circuit design, and long-term charge preservation considerations.
Main Results:
- The proposed method enables self-sensing of both displacement and applied force.
- Experimental validation showed force self-sensing errors below +/-8% with a 20 V peak-to-peak input signal.
- Effective compensation of material nonlinearities was demonstrated.
Conclusions:
- The developed method offers a reliable approach for simultaneous displacement and force self-sensing in piezoelectric cantilevers.
- The compensation strategies effectively address material nonlinearities, enhancing measurement accuracy.
- The technique shows promise for applications requiring precise force and displacement monitoring.

