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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Chien-Sheng Liu1, Psang Dain Lin
1Department of Mechanical Engineering, National Cheng Kung University, Tainan 70101, Taiwan. chienshengliu@itri.org.tw
This study introduces an irradiance-based method for calculating the geometric point spread function (PSF) of optical systems. The new technique offers an accurate and efficient way to estimate PSF, crucial for image formation theory.
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