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Development of fixed-point two-degree-of-freedom angular error measurement system with precision improvement

Yu Ming Su1, Chien-Sheng Liu1,2

  • 1Department of Mechanical Engineering, National Cheng Kung University, No.1, University Road, Tainan City 70101, Taiwan.

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|May 8, 2024
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Summary
This summary is machine-generated.

This study introduces a novel two-degree-of-freedom (two-DOF) angular error measurement system for die bonding machines. The system achieves high accuracy in measuring micro-angular errors, crucial for precision industries.

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Area of Science:

  • Precision Engineering
  • Optical Metrology
  • Mechanical Systems

Background:

  • Accurate measurement of micro-angular errors is vital for enhancing equipment precision in industries.
  • Die bonding machines require precise assembly angle error measurement for optimal performance.

Purpose of the Study:

  • To develop a two-degree-of-freedom (two-DOF) angular error measurement system.
  • To simultaneously measure assembly angle errors of a die bonding machine's bond head.

Main Methods:

  • Utilized the laser collimation method with a fiber laser and position-sensitive detectors.
  • Implemented angular drift compensation and averaging functions for enhanced accuracy.
  • Established a mathematical model using skew-ray tracing.

Main Results:

  • Achieved a measuring accuracy of ±0.25 arcsec.
  • Demonstrated a measuring repeatability of 0.3 arcsec.
  • Validated the system's effectiveness through experimental testing.

Conclusions:

  • The developed two-DOF system effectively measures micro-angular errors in die bonding machines.
  • The system's design and methods contribute to improved precision in manufacturing equipment.
  • The achieved accuracy and repeatability meet stringent requirements for precision industries.