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Updated: Jun 17, 2026

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
Published on: April 29, 2020
Developments in molecular SIMS depth profiling and 3D imaging of biological systems using polyatomic primary ions
John S Fletcher1, Nicholas P Lockyer, John C Vickerman
1Manchester Interdisciplinary Biocentre, School of Chemical Engineering and Analytical Science, University of Manchester, Manchester M60 1QD, UK.
Polyatomic ion beams offer new hope for molecular secondary ion mass spectrometry (SIMS) imaging, enabling sub-micron chemical analysis in 2D and 3D. Despite challenges, advancements promise improved dynamic range and depth profiling for biological discovery.
Area of Science:
- Analytical Chemistry
- Surface Science
- Biophysics
Background:
- Mass spectral imaging holds significant potential for biological discovery by combining chemical specificity with spatial analysis.
- Current limitations in molecular secondary ion mass spectrometry (SIMS) imaging include low ion yields and the need to sacrifice lateral resolution for sufficient signal.
- Metal cluster ion beams have improved yields but still operate under static limits, with molecular species yields often below 20 counts from 1 µm pixels.
Purpose of the Study:
- To review the potential of polyatomic primary ions for advancing molecular SIMS imaging.
- To explore new instrumental approaches for overcoming limitations in current Time-of-Flight SIMS (ToF-SIMS) instruments.
- To highlight prospects and continuing challenges in sub-micron molecular imaging and depth profiling.
Main Methods:
- Application of polyatomic primary ions with low damage cross-sections for molecular SIMS imaging.
- Utilizing voxels instead of pixels to enhance dynamic signal range in 2D imaging.
- Development of new instrumental directions enabling a direct current (dc) primary beam for ToF-SIMS.
Main Results:
- Polyatomic ions offer a new approach to molecular SIMS imaging, enabling analysis of wider chemistry within sub-micron areas and as a function of depth.
- Recent data on cell and tissue analysis suggest the prospect of improved sub-micron chemical accessibility.
- New instrumental developments show promise for realizing the full capabilities of polyatomic ion beams in SIMS.
Conclusions:
- Advancements in polyatomic ion beams and instrumentation offer significant prospects for high-resolution molecular SIMS imaging and 3D analysis.
- Challenges remain, including low ionization efficiency and matrix effects, which require further investigation.
- Future developments aim to overcome the limitations of pulsed ToF-SIMS, improving analysis times and spatial resolution.
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