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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
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Subsurface microscopy of interconnect layers of an integrated circuit

F Hakan Köklü1, M Selim Unlü

  • 1Department of Electrical and Computer Engineering and the Photonics Center, Boston University, Boston, Massachusetts 02215, USA.

Optics Letters
|January 19, 2010
PubMed

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