Molecular momentum transport at fluid-solid interfaces in MEMS/NEMS: a review

Bing-Yang Cao1, Jun Sun1,2, Min Chen1

  • 1Key Laboratory for Thermal Science and Power Engineering of Ministry of Education, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China.

Summary

This review explores molecular momentum transport at fluid-solid interfaces, crucial for microfluidics and nanofluidics in micro-/nano-electro-mechanical systems (MEMS/NEMS). It covers molecular dynamics, boundary conditions, and models for gas-solid and liquid-solid interfaces.

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