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Modulation Transfer Function of AZ111 Photoresist.

R G Brandes, R K Curran

    Applied Optics
    |January 30, 2010
    PubMed
    Summary

    Photoresist AZ111 is a linear medium for image recording. Its modulation transfer function (MTF) was measured, showing comparable results between calculated and actual photoresist image profiles.

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    Area of Science:

    • Materials Science
    • Optical Engineering
    • Photolithography

    Background:

    • Quantitative description of photoresist images is crucial for process control.
    • Photoresist materials are essential in microfabrication and semiconductor manufacturing.

    Purpose of the Study:

    • To quantitatively describe photoresist image profiles.
    • To establish control over photoresist processing using image analysis.
    • To define and measure the modulation transfer function (MTF) for photoresist AZ111.

    Main Methods:

    • Characterization of photoresist AZ111 as an image recording medium.
    • Definition and measurement of the modulation transfer function (MTF).
    • Comparison of experimentally measured and theoretically calculated image profiles.

    Main Results:

    • Photoresist AZ111 exhibits linear behavior as an image recording medium.
    • The modulation transfer function (MTF) for AZ111 was successfully defined and measured.
    • Experimental image profiles closely matched calculated profiles.

    Conclusions:

    • The MTF is a viable metric for quantifying photoresist image quality.
    • AZ111's linear response and predictable image profiles facilitate process control in photolithography.

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