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Velocity distribution function of sputtered Cu atoms obtained by time resolved optical absorption spectroscopy

Namjun Kang1, Soo-ghee Oh, Freddy Gaboriau

  • 1Université de Toulouse, UPS, INPT, LAPLACE (Laboratoire Plasma et Conversion d'Energie), 118 route de Narbonne, F-31062 Toulouse cedex 9, France.

The Review of Scientific Instruments
|February 2, 2010
PubMed

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