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Updated: Jun 16, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Note: A multifunction lens test system for imaging quality evaluation
Chun-Jen Chen1, Wen-Hong Wu, Kuo-Cheng Huang
1Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu 300, Taiwan. feet@itrc.org.tw
Abstract:
A novel multifunction lens imaging quality test system is established to overcome the practical problems in the conventional system. This system is compact, cost efficient, user friendly, and suitable for lens quality control in production line. The established system can evaluate the modulation transform function, imaging depth, image distortion, and light intensity distribution of the tested lens by auto-changing the tested patterns. This system consists of a tested lens, a charge coupled device (CCD) camera, a linear motorized stage, a system fixture, an observer liquid crystal display (LCD) monitor, and a notebook for providing patterns. The LCD monitor displays a series of specified tested patterns sent from the notebook. Then each displayed pattern goes through the tested lens and images in the CCD camera. Consequently, the performance of the tested lens can be evaluated by analyzing the image of CCD camera with special designed software. The advantage of this system is that it can complete a whole test quickly without interruption part replacement because the tested patterns are statically displayed on LCD monitor and controlled by the notebook.
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