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Updated: Jun 16, 2026

Free-form Light Actuators &#8212; Fabrication and Control of Actuation in Microscopic Scale
08:17

Free-form Light Actuators — Fabrication and Control of Actuation in Microscopic Scale

Published on: May 25, 2016

Gratings for integrated optics by electron lithography.

J C Tracy, L F Thompson, R D Heidenreich

    Applied Optics
    |February 6, 2010
    PubMed
    Summary
    This summary is machine-generated.

    High-quality electron lithography fabricated diffraction gratings using a novel negative resist. These gratings efficiently couple light into dielectric waveguides, achieving up to 20% efficiency.

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    Area of Science:

    • Materials Science
    • Optics
    • Nanotechnology

    Background:

    • Electron lithography is crucial for fabricating nanoscale structures.
    • Diffraction gratings are essential optical components.
    • Efficient light coupling in waveguides is a key challenge.

    Purpose of the Study:

    • To report the electron lithographic fabrication of high-quality diffraction gratings.
    • To demonstrate their application as couplers for thin-slab dielectric waveguides.
    • To evaluate the efficiency of this coupling method.

    Main Methods:

    • Utilized electron lithography with a novel negative resist (copolymer of glycidyl methacrylate and ethyl acrylate).
    • Employed a new scan generator with high linearity (1 in 10^4).
    • Fabricated gratings with periods from 0.25 to 1.5 micrometers and up to 3000 lines.

    Main Results:

    • Achieved diffraction gratings with long-range order (delta a(o)/a(o) <= 5 x 10^-4).
    • Demonstrated gratings as efficient couplers for thin-slab dielectric waveguides.
    • Obtained coupling efficiencies up to 20% for specific wavelength-to-period ratios (0.5 < lambda(o)/a(o) < 1.1).

    Conclusions:

    • The developed electron lithography technique enables high-quality diffraction grating fabrication.
    • The negative resist offers superior sensitivity compared to traditional positive resists.
    • These gratings are effective for light coupling in dielectric waveguides, with significant potential for optical device applications.