Nonoxide chalcogenide glass films for integrated optics.

Area of Science:

• Materials Science
• Optoelectronics
• Photonics

Background:

• Chalcogenide glasses are promising materials for optical applications due to their unique optoelectronic properties.
• Sputtering is a versatile technique for depositing thin films with controlled stoichiometry and morphology.
• Waveguiding in thin films is crucial for integrated optical devices and photonic circuits.

Purpose of the Study:

• To evaluate the waveguiding characteristics of sputtered films of three distinct chalcogenide glasses.
• To quantify propagation losses in these films at a specific wavelength (1.064 microm).
• To explore the fabrication and study of both continuous films and delineated waveguides.

Main Methods:

• Thin film deposition using sputtering.
• Optical characterization of waveguiding properties.
• Measurement of propagation losses using established techniques.

Main Results:

• Demonstrated waveguiding in sputtered films of As(2)S(3), Ge(28)Sb(12)Se(60), and Ge(33)As(12)Se(55).
• Achieved propagation losses below 1 dB/cm for As(2)S(3) films.
• Successfully fabricated and studied both continuous films and delineated waveguide structures.

Conclusions:

• Sputtered chalcogenide glass films, particularly As(2)S(3), show excellent potential for integrated optics.
• The low propagation losses in As(2)S(3) films make them suitable for photonic applications.
• The ability to create both films and delineated guides offers flexibility in device design.