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Scanning Electron Microscopy

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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Related Experiment Video

Updated: Jun 16, 2026

Scanning-probe Single-electron Capacitance Spectroscopy

Scanning-probe Single-electron Capacitance Spectroscopy

Published on: July 30, 2013

Single electron recording by self-scanned diode arrays.

S B Mende, E G Shelley

|February 6, 2010

Summary

Self-scanning semiconductor arrays can detect single electrons for multichannel photoelectron counting. This technology, using electron bombardment, shows promise for advanced photoelectronic detectors.

Area of Science:

Semiconductor physics
Photonics
Detector technology

Background:

Multichannel photoelectron counting systems are crucial for various scientific applications.
Existing systems face limitations in sensitivity and resolution.
Self-scanning semiconductor arrays offer potential for enhanced performance.

Purpose of the Study:

To investigate the feasibility of using self-scanning semiconductor arrays in electron bombardment mode for single-electron detection.
To evaluate the signal-to-noise ratio (SNR) of these arrays under electron bombardment.
To assess the potential for creating a novel multichannel photoelectron counting system.

Main Methods:

Subjecting self-scanning light-sensitive diode arrays (Reticon RL128L) to electron bombardment.

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Using a radioactive Nickel-63 (Ni(63)) source to test electron responsiveness.

Employing a 42-keV electron accelerator to analyze pulse distribution peaks from single, double, and triple electron incidences.

Main Results:

Demonstrated that the 128-element self-scanned linear diode arrays respond to electrons.
Achieved good agreement between incident and measured high-energy electron fluxes.
Resolved distinct pulse distribution peaks corresponding to single, double, and triple electron incidences.
Observed that peak heights followed a Poisson distribution, confirming random electron incidence.

Conclusions:

Self-scanning semiconductor arrays are viable for single-electron detection in electron bombardment mode.
The developed system approaches theoretical performance limits for photoelectronic detectors.
Integration into photoelectronic tubes can yield advanced self-scanned photoelectronic detectors.