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Updated: Jun 16, 2026

Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition
Published on: August 29, 2017
This review covers reflective multilayer coatings for extreme ultraviolet and soft X-ray wavelengths. Optimizing material placement minimizes absorption losses, enabling high reflectivity near 100% above 1200 Å.
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