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Top-down nanomechanical machining of three-dimensional nanostructures by atomic force microscopy

Yongda Yan1, Zhenjiang Hu, Xueshen Zhao

  • 1School of Mechatronics Engineering, Harbin Institute of Technology, P. O. Box 413, Harbin 150001, P.R. China.

Small (Weinheim an Der Bergstrasse, Germany)
|February 19, 2010
PubMed
Summary

No abstract available in PubMed .

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Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...